2021 |
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Metal removal life test and organic impurity of ion exchange resin
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
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Shota Morino;
Noriko Hisano;
Yukinari Yamashita;
Ayano Kato; Yukari Nitanai
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Isopropyl Alcohol (IPA); Metal Contamination; Ion Exchange; Membranes; Organic Contamination |
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2021 |
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Reliability evaluation of liquid particle counter (LPC) using field-flow fractionation toward accurate particle measurement
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultrapure water strand.
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Fumitaka Ichihara;
Hiroshi Sugawara;
Tsukasa Kondo;
Ayako Nakamura; Haruhisa Kato
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Particle Count and Detection; Particles |
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2020 |
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Trace metal analysis (ppq level) in ultrapure water using Monolith as an ion concentrator
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW Contamination Control session.
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Kyohei Tsutano;
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Metal Contamination; Ion Exchange |
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2020 |
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UPW Contamination Control - Q&A
This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the Ultrapure Water Production track, and included speakers from the UPW Contamination Control session.
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Glen Slayter;
Dan Rodier;
Kyohei Tsutano;
Sid Sampath
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Particle Count and Detection; Metal Contamination; Filtration; Nanoparticles |
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2019 |
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Synthesis and Application of New Ion Exchanger for Ultra Pure Water Treatment
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultrapure Water Production track, as part of the Enabling Technology session.
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Kyohei Tsutano;
Daisaku Yano; Hitoshi Takada
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Ion Exchange; Metal Contamination |
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2019 |
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The Pretreatment Method for High Water Recovery RO System
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the New Approaches in Water Management session.
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Taro Oe;
Akhiro Takada; Toru Nakano
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Reverse Osmosis (RO); Water Consumption and Conservation; Environmental Impact and Compliance |
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2019 |
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Optimized Combination of Cationic and Anionic Ion Exchange Resins for the Removal of Trace Amount of Metal Impurities from Isopropyl Alcohol
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Onsite Purification session.
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Noriko Hisano;
Yui Shioya;
Yasuhiro Yoshimura;
Haruo Yokota
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Metrology and Analytical Technology; Ion Exchange; Metal Contamination; Isopropyl Alcohol (IPA) |
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2019 |
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Ultrapure CO2 Supply and Recycle System for the Supercritical CO2 Drying Process in Nano-Scale Semiconductor Manufacturing
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
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Takashi Futatsuki;
Hiroshi Sugawara; Yoshinori Ono
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High Purity Gases; Particle Count and Detection; Metrology and Analytical Technology |
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2019 |
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Xe Recovery and Reuse System from Etching Process Exhaust Gas
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
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Takashi Futatsuki;
Yoshinori Ono; Yuki Nakamura
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High Purity Gases; Metrology and Analytical Technology |
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2018 |
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Development of an Online Urea Monitor for Ultrapure Water Production in Semiconductor Fabrication Plants
This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultrapure Water Production track, as part of the Advanced Analytical Methods for UPW session.
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Hiroshi Sugawara;
Fumitaka Ichihara;
Kazushige Takahashi;
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Organic Contamination; Metrology and Analytical Technology |
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