Company Profile

TSI Incorporated

Based in Shoreview, MN, USA



TSI is a global leader in measurement instrumentation, specialising in metrology for detecting sub-micron and nanoparticles in semiconductor manufacturing. One of its flagship products is the AeroTrak+, which uses laser spectroscopy to detect airborne particles. TSI combines its 0.1 ┬Ám airborne particle counters and 0 nm cleanroom condensation particle counters with software solutions to allow autonomous monitoring. In addition, MSP, a division of TSI, supplies liquid source vaporisation equipment.