Reliable, Confident Environmental Monitoring for Ultra-Clean Semiconductor Environments
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TSI Inc., international leader in measurement technology for nearly 60 years and recognized leader in high-sensitivity particle counting, offers a range of instruments to reduce the risk during fabrication processes by detecting sub-micron and nanoparticles that contaminate products, including but not limited to semiconductor applications.

Minimize your risk, easily pass audits, and reduce product waste with TSI’s new AeroTrak®+ Remote Airborne Particle Counters—top-choice for uninterrupted, reliable particle counting during semiconductor or electronics manufacturing. Covered by an industry-exclusive 5-year laser warranty.

TSI also offers other high-sensitivity particle counting instruments. TSI 0.1 µm airborne particle counters and 10 nm cleanroom condensation particle counters are designed to meet the critical needs of the semiconductor industry by providing complete contamination detection ≥10 nm. TSI FMS Software with OPC UA Client/Server functionality makes it easy to exchange data to continuously monitor semiconductor manufacturing cleanrooms—and pass audits.

Learn more about how to lower your risk and easily pass an audit >