The latest on SEMI standards

New standards SEMI MS14 – An important publication for UPM members, SEMI newly released a guide for gas sensors in April 2022. With the state of technology of gas sensors in evolution, this guide describes a core set of parameters to characterize a gas sensor and allow data-driven comparison of products.

Revised standards SEMI E10 – This standard, which concerns the measurement of reliability, availability and maintainability (RAM) of all manufacturing equipment systems, underwent a technical revision in April 2022. The standard is designed to improve communication between end-users and suppliers in the semiconductor and related industries.

SEMI M87 - This standard, which was revised in April 2022, specifies methods for contactless measurement of the restivity of semi-insulating samples and wafers.

SEMI E132 - This standard revision in April 2022 concerns the method for restricting access to communication through client authentication.

SEMI E54.4 - This standard, which was revised in April 2022, define communication specification between devices based on a Sensor/Actuator Network (SAN).