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2020

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Technology Roadmap - Focusing on Enabling Yield of Next Generation Devices
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented as a Keynote presentation.
FTD Solutions; ... IRDS & SEMI; IRDS Update; Roadmap View
2020

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Semiconductor Industry Needs in UPW and Water Management During Turbulent Times
This webinar begins with Slava Libman, FTD Solutions, presenting the annual International Roadmap for Devices and Systems (IRDS) and SEMI Standards Update. Following the presentation we continue with a panel discussion exploring risk management, resilience, and sustainability within the industry. Using the IRDS roadmap as an outline, our expert panellists discuss the continuing need for making improvements to technological gaps and facilities’ environmental footprints, whilst building a secure and sustainable future for the industry.
Evoqua Water Technologies; Enviro-Energy Solutions; Page; Intel; FTD Solutions; ... IRDS; SEMI Standards; Sustainability; Risk Management; Technology Gaps View
2020

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Substrate Environment Contamination Control - The Manufacturing Tools Perspective
This webinar features a presentation from Nabil Mistkawi, Samsung Austin Semiconductor, who identifies key technology requirements for wet chemicals and gases from an end user perspective. This was followed by an engaging discussion between tool OEM companies and end users, as they explored the contamination control needs of individual environments, showing where contamination impacts the process, thereby bringing together the supply chain with the clean room.
ASML; Samsung Austin Semiconductor; SCREEN Holdings; Applied Materials; Intel; Page; FTD Solutions; ... Technology Gaps; Wet Chemicals; Gases; Enduser Perspective; Contamination Control View
2020

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Proactive Solutions in Water Management for Advanced Semiconductor Manufacturers
Water management at advanced facilities has become increasingly complex. The manufacture of the new generation of technologies has increased water demands and posed new challenges for internal and external infrastructure. This webinar focused on proactive solutions and strategies based on recent developments in SEMI Standards. The panel then discussed risk management, environmental compliance, reliability issues and data management for water management challenges.
FTD Solutions; Intel; Ovivo; Page; Samsung Austin Semiconductor; ... Water Management; Infrastructure Challenges; SEMI Standards; Environmental Comliance; Data Management View
2017
Re-Purposing of Used or Surplus Water Treatment Equipment and Membranes​
This presentation was given at the Ultrapure Micro 2017 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the Enduser Perspective in Water Management session.
Samsung Austin Semiconductor; Cypress Semiconductor; Watersurplus ... Enduser; Case Study; Equipment; Cost Management; Sustainability View
2017
Challenges and opportunities for particle control in advanced semiconductor manufacturing
This article provides an overview of the biggest challenge of UPW technology – particle control. The latest semiconductor technologies require near particle-free water, where the “killer” particle size is far below the size that UPW metrology can effectively detect. Also, current advanced treatment methods cannot guarantee reliable removal of killer-sized particles. The quality of the high-purity materials used downstream of the final filters has not typically been tested for shedding of the “killer” particles. Consequently, the semiconductor industry requires a comprehensive approach for the particle control. A new approach should include mitigating particle occurrence and continuously improving the technologies used in UPW polish and distribution systems. Such an approach should also include extensive use of SEMI standards to improve the quality of the materials used; a new way to engineer solutions related to system-configuration and system design; improved process control; and a careful review of critical operational decisions. Collaboration throughout the industry via IRDS and SEMI Standards is key to enabling such systematic improvement, and overcoming the metrology and other constraints. This article was originally published in the Ultrapure Micro Journal in November 2017.
Kanomax FMT; FTD Solutions; Samsung Austin Semiconductor; ... Ultrapure Water; Particles View
2016
Maximizing Semiconductor Water and Chemical Recycle and Re-Use Using Segregation and Advanced Automation
This presentation was given at the Ultrapure Micro 2016 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the Water Management session.
Samsung Austin Semiconductor; Hyperion ... Waste Management; Chemical Drain Segregation; Waste Stream Segregation; Automation View