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Year Materials Info Company Author Tags View
2019
A Novel ICP-MS Metrology for Analysis of Nanoparticles in UPW​
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW Analytical Methods and Techniques session.
Air Liquide; ... Inductively Coupled Plasma Mass Spectrometry (ICP-MS); Nanoparticle Characterization; IRDS & SEMI; Particle Concentration; Metrology View
2019
Quantitative ICP-MS Analysis of High-k ALD Precursors ​for Trace Elemental Impurities
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
Air Liquide; ... Inductively Coupled Plasma Mass Spectrometry (ICP-MS); High-k ALD Precursors​; Trace Impurities​ View
2018
A Non-Traditional ICP-MS Analysis for Nanoparticles Characterization of Ultra-Pure Water (UPW)
This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultrapure Water Production track, as part of the Particle Analysis and Control in UPW session.
Air Liquide; ... Inductively Coupled Plasma Mass Spectrometry (ICP-MS); Single Nanoparticle ICP-MS; Nanoparticle Characterization; Analytical Technology View