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2022 IRDS & SEMI Standards Update

Date published: 2022

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Enabling Advanced Semiconductor Yield via Proactive Technology Management - an overview of the IRDS research work and future roadmap, as well as SEMI standard and future focus areas.

Companies: CT Associates; FTD Solutions; Page;

Authors: Gary van Schooneveld; Slava Libman; Dan Wilcox;

Tags: SEMI; IRDS; Sustainability; Particle Precursors; Energy Conservation; Water Conservation