2022 IRDS & SEMI Standards Update

New ESG goals, emerging contaminants, and regulatory drivers impose new constraints on facilities. How can facilities crack the code in balancing competing targets related to water circularity, chemicals usage, energy consumption, and gas emissions, when facilities are only becoming more resource-intensive? This webinar will bring experts to bring vital awareness to water stewardship, reducing energy and emissions, and tool design for sustainability.

Speakers from Samsung, Intel, SCREEN, and FTD Solutions speak about why the semiconductor industry's resource consumption is dramatically increasing, as well as the water-energy relationship and other interrelated priorities which impact decision-making about sustainability.

A discussion about semiconductor facilities’ environmental footprint in relation to water consumption, energy usage, and site selection considerations.

Current "one-pass" industry practices around generation and application of hot ultra-pure water (hot-UPW) consume large amounts of energy to generate the hot-UPW input, and also use the resulting water inefficiently. This presentation showcases engineered solutions to improve efficiency of hot-UPW water use, greatly reducing consumption of hot UPW without any impact to the process.

A study on how back grinding and dicing waste water are good low-hanging fruit candidates for short circuit reclaim or at least raw water substitution. Both approaches keep the water body within the fab and have huge cost benefit over simple discharge of the highly valuable permeate.

The semiconductor industry has increasingly ambitious sustainability goals. Eco efficiency goals are sometimes difficult to achieve in tandem with each other. For example, high water recovery requires more energy and chemicals. Additional energy also requires more evaporation water in the cooling towers. A modelling tool will be introduced to study scenarios to keep water and energy efficiency in balance and what impact it has on other boundary conditions. Improvements will require a different mindset in the future since potential solutions are multi-disciplinary and require cooperation of many different stake holders in the fab.

Unprecedented demand for semiconductor products is compelling the construction of larger, more complex facilities which consume increasing quantities of energy and water.

Roundtable handout from February Community Event

Roundtable event opening remarks at February Community Event