300mm unpatterned wafer defect review and characterization with universal surface enhanced Raman spectroscopy

Date Published 2021 | Conference materials

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This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.

Organizations: UNISERS
Tags: Particle Count and DetectionIRDSParticle PrecursorsWafer Defectivity

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