A New Approach to Increasing Fluoride Treatment Capacity in Semiconductor Fabs
Date published: 2015
Please login or subscribe to view UPM Resources.
This presentation was given at the Ultrapure Micro 2015 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the Wastewater Management Solutions session.
Companies: Evoqua Water Technologies;
Tags: Fluoride Treatment; Solids Separation; Fab Operation