A New Method for the Rapid Identification of sub-20nm Particles in UPW​

Date published: 2017

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This presentation was given at the Ultrapure Micro 2017 annual conference. It was presented in the Ultrapure Water Production track, as part of the Enabling Advanced Fab Needs session.

Companies: Kanomax FMT; CT Associates; FTD Solutions;

Authors: Gary van Schooneveld; Slava Libman; David Blackford

Tags: Particle Precursors; Particles; Filtration; Particle Count and Detection; Silica