A Retrospective Review of AMC Issues: Our Understanding and Issues Incurred

Date published: 2020

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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.

Companies: Samsung Austin Semiconductor; Texas A&M University;

Authors: Walter Den; Cesar Garza

Tags: Airborne Molecular Contamination (AMC); FOUP; Cleanroom; Ultra-pure Air; Enduser