AMC & High Purity Gases Control - Q&A

Date published: 2020

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This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the AMC, Liquid Chemicals & Gases Control track, and included speakers from the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.

Companies: Texas A&M University; Air Liquide; Tiger Optics; Syft Technologies

Authors: Walter Den; Florian Adler; Helena Barnes; Maohua Pan

Tags: Airborne Molecular Contamination (AMC); Metrology and Analytical Technology; High Purity Gases

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...	2021	Please login or subscribe to view UPM Resources.	Real-time monitoring of AMCs from lab to fab This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.	IONICON Analytik;	Jens Herbig;	Airborne Molecular Contamination (AMC); Metrology and Analytical Technology	View
...	2021	Please login or subscribe to view UPM Resources.	Enhanced rate-of-rise measurements using oxygen This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.	Hexisense;	Ian Rousseau;	Airborne Molecular Contamination (AMC); Metrology and Analytical Technology; High Purity Gases	View
...	2021	Please login or subscribe to view UPM Resources.	Quantum cascade laser cavity ring-down spectroscopy analyzers for PPT-level CO and CO2 detection This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.	Tiger Optics;	Florian Adler;	Metrology and Analytical Technology; Airborne Molecular Contamination (AMC); High Purity Gases	View
...	2020	Please login or subscribe to view UPM Resources.	The challenges of Improving Sensitivity and Speed of Response for Detecting Airborne Molecular Contaminants in Cleanrooms This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.	Tiger Optics;	Florian Adler;	Airborne Molecular Contamination (AMC); Fluoride; Ammonia; Metrology and Analytical Technology	View
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...	2019	Please login or subscribe to view UPM Resources.	Xe Recovery and Reuse System from Etching Process Exhaust Gas This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.	Organo;	Takashi Futatsuki; Yoshinori Ono; Yuki Nakamura	High Purity Gases; Metrology and Analytical Technology	View
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AMC & High Purity Gases Control - Q&A

Related resources

Measurement of nanoparticles and their precursors

Real-time monitoring of AMCs from lab to fab

Enhanced rate-of-rise measurements using oxygen

Quantum cascade laser cavity ring-down spectroscopy analyzers for PPT-level CO and CO2 detection

The challenges of Improving Sensitivity and Speed of Response for Detecting Airborne Molecular Contaminants in Cleanrooms

A Retrospective Review of AMC Issues: Our Understanding and Issues Incurred

Xe Recovery and Reuse System​ from Etching Process Exhaust Gas​

Ultrapure CO2 Supply and Recycle System for the Supercritical CO2 Drying Process in Nano-Scale Semiconductor Manufacturing​

Advanced Microscopy for Quantification and Identification in UPW, Process Chemicals, and Industrial Gases

Xe Recovery and Reuse System from Etching Process Exhaust Gas

Ultrapure CO2 Supply and Recycle System for the Supercritical CO2 Drying Process in Nano-Scale Semiconductor Manufacturing