AMC & High Purity Gases Control - Q&A

Date published: 2020

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This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the AMC, Liquid Chemicals & Gases Control track, and included speakers from the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.

Companies: Texas A&M University; Air Liquide; Tiger Optics; Syft Technologies

Authors: Walter Den; Florian Adler; Helena Barnes; Maohua Pan

Tags: Cleanrooms; Real-Time Monitoring; High Purity Gases