Asymptotically Approaching Zero Defects; The Future of Post-CMP Cleaning

Date published: 2019

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This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented during the Learning Series, as part of the Ultra High Performance Chemicals and High Purity Gases track.

Companies: Entegris;

Tags: PCMP Cleaners; Metrology; Electrochemistry; New Materials; Modeling