| 2020 |
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Effects of Static Electricity on Voltage-sensitive Metrology for Chemical Delivery Systems
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Contamination Control in Liquid Chemicals session.
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Mega Fluid Systems
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Michael Perkins
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Delivery Systems; Metrology; Electrostatic Discharge (ESD); High Purity Chemicals |
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| 2020 |
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When Should Skew Corrected Control Limits be Updated?
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Contamination Control in Liquid Chemicals session.
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Merck Group/EMD;
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Tom Bzik;
Suhas Ketkar
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Skew Correction; Upper Control Limit; High Purity Chemicals |
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| 2020 |
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Method Development for Trace Impurities in Novel Sub-nm Photoresists by Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Contamination Control in Liquid Chemicals session.
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ChemTrace;
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Elizabeth Appiah; Linh Nguyen; Mohsina Islam; Peng Sun
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Inductively Coupled Plasma Mass Spectrometry (ICP-MS); Trace Metals; Trace Impurities; New Materials |
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