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Copper and Hydrogen Peroxide (H2O2) Removal from Copper CMP & Solar Cell Wastewater

Date Published 2016 | Conference materials

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This presentation was given at the Ultrapure Micro 2016 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the Cu Treatment and Water Management session.

Authors: Christoph Riley, Adam Redding,
Tags: Metal ContaminationCopperHydrogen Peroxide (H2O2)Ion ExchangeChemical Mechanical Planarization (CMP)

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