Critical Organics Risk Assessment of High-Purity Polymer Piping​

Date Published 2022 | Conference materials

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

Already have an account? Log in

Organic contamination present in Ultrapure Water (UPW) and other liquids pose a risk of depositing on the wafer surface during processing and cleaning. Of greatest concern are those deposits that are non-volatile. These are designated as “Critical Organics”. The objectives of this study are to quantify the extraction of critical organics from high-purity piping in hot UPW; specifically, PFA and PVDF, assess the affinity of the organic contaminants to the wafer surface during spin processing and to determine the relative concentrations of organic contamination remaining on the wafer surface as a function of temperature.

Organizations: CT Associates
Authors: Larry Zazzera,
Tags: Hot UPWOrganic ContaminationUPWPFAS

Related content

Conference material | 2018
Development of an Online Urea Monitor for Ultrapure Water Production in Semiconductor Fabrication Plants
Conference material | 2022
PFAS Treatment Management and Design Best Practices
UPW journal archive | 2017
Can advanced oxidation technology help control TOC in semiconductor water?
Conference material | 2022
What is Known About Urea Control in UPW Systems?​

Back to results

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo