Diversion of Hydrofluoric acid (HF) and ethylene glycol mix to fluoride wastewater for treatment

Date published: 2021

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This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.

Companies: Samsung Austin Semiconductor;

Authors: Victoria Yun; Dan Wilson; Britt Taylor-Burton

Tags: Environmental Impact and Compliance; Fluoride; End-user; Wastewater Reclamation and Reuse