Establishing Correlations between UPW Quality and Particle Deposition on Silicon 300 mm Wafer
Date published: 2022
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In the yield enhancement report 2021 there is a call for highly controlled deposition experiments to determine the particle deposition rate on the wafer compared to the known particle count in the ultrapure water (UPW) to gain better understanding about the contamination sources on-wafer. The goal of this collaborative study between Lam Research as a tool supplier and Ovivo Switzerland as an UPW engineering company is to investigate potential correlation between UPW quality form a full scale UPW plant and particle deposition on standard silicon 300 mm wafer.
Authors: Philippe Rychen; Alois Goller;
Tags: Organic Contamination; Yield; UPW