Evaluating three generations of UPW filtration technology using SEMI C79

Date published: 2021

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.

Companies: Intel; CT Associates;

Authors: Ryan Pavlick; Gary van Schooneveld; Sriram Ramamoorthy; David Neitling; Hokkin Choi; Vani Thirumala; Vindhya

Tags: SEMI; Filtration; End-user