GEMU - C53 iComLine Motorized Control Valve
Date published: 2021
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The 2/2-way diaphragm globe valve GEMÜ C53 iComLine was developed for precise and demanding control applications in semiconductor production. The sealing concept of the valve is based on the tried and tested GEMÜ PD design, whereby actuator and medium are separated by a PTFE regulating cone. As the regulating cone contour, actuator stroke and connection size can be customized to meet customers' requirements, the GEMÜ C53 iComLine satisfies virtually all control and flow requirements of the high-tech semiconductor industry. Thanks to the combination of the precise stepper motor with ultra pure body materials, it is particularly suitable for lithography, CMP, and etching processes, as well as applications in the analysis field of any semiconductor production.Click to read the datasheet.
Companies: Banner Industries;
Authors: Susan Butler;
Tags: Valves; Lithography; CMP Slurry