Hot UPW Shutdown and Return to Production: An Operational Guide to Minimizing System Impact and Planning for the Unknown
Date published: 2018
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This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Technology and Project Management in Semiconductor Water and Chemicals session.
Companies: Samsung Austin Semiconductor;
Authors: James Lee; Varinder Malik; Gary Shrestha; Alana Denning; Charlotte Parks; Dave Everett
Tags: End-user; Case Study; Risk Management; Fab Operation; UPW System