Hot UPW Shutdown and Return to Production: An Operational Guide to Minimizing System Impact and Planning for the Unknown

Date published: 2018

Please login or subscribe to view UPM Resources.

This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Technology and Project Management in Semiconductor Water and Chemicals session.

Companies: Samsung Austin Semiconductor;

Authors: James Lee; Varinder Malik; Gary Shrestha; Alana Denning; Charlotte Parks; Dave Everett

Tags: End-user; Case Study; Risk Management; Fab Operation; UPW System

Related resources

Apply
Id Year Materials Info Company Author Tags View
... 2022

Please login or subscribe to view UPM Resources.
Advanced Technology Design for hot UPW supply
A study of operational decisions to increase capacity to allow greater consumption of hot ultrapure water. This presentation shows a new design in a fab which is successively transferred to the other existing hot ultra pure water plants, in order to be able to react to future changes in consumption.
 GlobalFoundries; Ute Sierig; Fab Operation; Ultraviolet (UV); UPW System View
... 2022

Please login or subscribe to view UPM Resources.
Deconstructing the Challenges of Facility 2.0: Yield & Reliability Drivers
Presentation given at April 7th 2022 online UPM Community event.
 FTD Solutions; Page; Qualcomm; Tokyo Electron; Slava Libman; Dan Wilcox; Mustafa Badaroglu; Supika Mashiro End-user; Data Management; Modeling; Risk Management; Yield View
... 2021

Please login or subscribe to view UPM Resources.
Navigating business continuity during a natural disaster while in the midst of a pandemic
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
 Evoqua Water Technologies; Jill Wallin; Supply Chain; Risk Management; Fab Operation View
... 2021

Please login or subscribe to view UPM Resources.
Intel Keynote 2021
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as a keynote presentation
 Intel; Dominic Greensmith; Supply Chain; End-user; Risk Management View
... 2021

Please login or subscribe to view UPM Resources.
Risk centered asset management
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
 FTD Solutions; Micron; Dave Buesser; Deena Starkel; Case Study; Risk Management; End-user; Fab Operation View
... 2021

Please login or subscribe to view UPM Resources.
Water and wastewater supply chain management
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as a keynote presentation as part of the water and wastewater management strand.
 Intel; Assaf Harel; Supply Chain; End-user; Risk Management View
... 2020

Please login or subscribe to view UPM Resources.
Hydrofluoric acid (HF) Neutralization and Precipitation Utilizing High Performance Lime
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the Wastewater Treatment session.
 Lhoist; Samsung Austin Semiconductor; Narahari Kramadhati; Luke Wilson; Stephanie Lopez; Fluoride; Case Study; End-user View
... 2020

Please login or subscribe to view UPM Resources.
Understanding Nanoparticle Contamination in Ultrapure Water Generation and Distribution
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW Contamination Control session.
Intel; Particle Measuring Systems; Glen Slayter; Dan Rodier; End-user; Nanoparticles; Particle Count and Detection; Metrology and Analytical Technology; Case Study; UPW Polishing View
... 2020

Please login or subscribe to view UPM Resources.
Approaching UPW System Management and Design in a Systematic Way
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW System Improvement session.
FTD Solutions; CMC Materials; Jesica Beccue; Josh Best; UPW System; Case Study View
... 2020

Please login or subscribe to view UPM Resources.
Microanalysis: A novel method to characterize and speciate contaminants in Ultra Pure Water (UPW) and other aqueous chemicals
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Wafer Contamination Control - Particles Monitoring session.
 Intel; Ashutosh Bhabhe; Rushi Matkar; Glen Slayter; Mitchell Kilroy; Suwen Liu Metrology and Analytical Technology; Case Study; UPW System; Hydrogen Peroxide (H2O2); UPW Polishing View