Impact of Right Skew on Upper Control Limit Estimation for Trace Impurities in Semiconductor Chemicals

Date published: 2019

Please login or subscribe to view UPM Resources.

This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Contamination Measurement session.

Companies: Merck Group/EMD Electronics; Versum Materials

Authors: Tom Bzik; Suhas Ketkar

Tags: Data Management; Modeling; High Purity Chemicals