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Microanalysis: A novel method to characterize and speciate contaminants in Ultra Pure Water (UPW) and other aqueous chemicals

Date Published 2020 | Conference materials

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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Wafer Contamination Control - Particles Monitoring session.

Organizations: Entegris , Intel
Authors: Suwen Liu, Mitchell Kilroy,
Tags: Case StudyUPW PolishingMetrology and Analytical TechnologyHydrogen Peroxide (H2O2)UPW System

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