Purification Method for High Purity PGMEA Using Ion Exchange Resins and Analysis of High Sensitive Trace Metals by ICP-MS

UF even withstands episodic increase of particle numbers in the feed (e.g., caused by conditioning of ion-exchange resins) without negative effects for water quality and service lifetime. Such a particle challenge typically involves high concentrations of ~10-nanometer (nm) particles. On the other hand, current on-line particle counters approach their lower detection limit at about 10nm. Large numbers of particles nearby and below this limit remain undetected. Hence, the integrity of a UF membrane is essential to keep these small particles under control; it can hardly be evaluated by comparing particle counts upstream and downstream. Therefore, better test methods are needed to identify membrane damages, and to decide on service life and replacement of UF membranes.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.

The ability to conduct current through a liquid is measured by conductivity and can be related to the concentrations of ions in the solution. In this work, a patented analytical technique is used to quantify the contaminant level of specific chemicals in an on-line ultrapure water (UPW) system. The method uses a resistivity system with additional mathematical techniques to exploit the physical relationship between temperature and resistivity. This method utilises the slope between resistivity/temperature curves and not the absolute resistivity. The theoretical conductance of chemicals is compared with experimentally-measured values from 1 parts-per-trillion (ppt) to 10 parts-per-billion (ppb). This work helps establish the characteristics of compounds that can be measured with this technique and determines the limits of detection, and therefore has a potential commercial application. High conductance compounds like sodium chloride and potassium hydrogen phthalate are measurable at the 100 ppt level while low conductance compounds like boric acid cannot be discerned from the background. As the method matures into a product the limits of detection should be lowered. This article was originally published in the Ultrapure Micro Journal in March 2019.

This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the AMC, Liquid Chemicals & Gases Control track, and included speakers from the Contamination Control in Liquid Chemicals session.

This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the Ultrapure Water Production track, and included speakers from the UPW Process Optimization session.

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Contamination Control in Liquid Chemicals session.

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Contamination Control in Liquid Chemicals session.

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW Contamination Control session.