Recycle of SPM in Single-Wafer Process Applications
Date Published 2022 | Conference materials
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In order to conserve the amount of SPM used, this scenario showcases drain switching which allows the SPM that is dispensed later in the process to be reclaimed and reused. This capability is being used in high volume manufacturing.
Organizations: SCREEN SPE
Tags: Hydrogen Peroxide (H2O2)Sulfuric AcidHigh Purity ChemicalsChemical Reuse
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