Retention Efficiency for sub-30 nm Particles Quantitatively Measured by Single Particle Detection

Date published: 2019

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This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Nanoscale Analytical: PPW? session.

Companies: 3M;

Tags: Metrology and Analytical Technology; Nanoparticles; Particle Count and Detection; SEMI