Silica Detection in H2SO4 and HCl with Universal Surface-Enhanced Raman Spectroscopy​

Date published: 2019

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This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Contamination Measurement session.

Companies: UNISERS;

Authors: Ali Altun;

Tags: Particle Count and Detection; Metrology and Analytical Technology; Silica; Wafer Defectivity