sTPC Enabled New UPW Ultra Filter Product Quality for Microelectronic Manufacturing​

Date published: 2017

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This presentation was given at the Ultrapure Micro 2017 annual conference. It was presented in the Ultrapure Water Production track, as part of the Enduser Perspective in UPW session.

Companies: Samsung Austin Semiconductor;

Authors: James Lee; Varinder Malik; Gary Shrestha;

Tags: End-user; Case Study; Filtration; Particles; Particle Count and Detection; UPW Polishing