Technology Roadmap - Focusing on Enabling Yield of Next Generation Devices

Date published: 2020

Please login or subscribe to view UPM Resources.

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented as a Keynote presentation.

Companies: Entegris; Intel; Enviro-Energy Solutions; Page; FTD Solutions; Applied Materials; Infineon Technologies;

Authors: Slava Libman; Dan Wilcox; Andreas Neuber; Bob McIntosh; Christoph Hocke; Kevin Prettyman; Nabil Mistkawi

Tags: IRDS; Particle Precursors; Wafer Defectivity