Technology Roadmap - Focusing on Enabling Yield of Next Generation Devices
Date published: 2020
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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented as a Keynote presentation.
Authors: Slava Libman; Dan Wilcox; Andreas Neuber; Bob McIntosh; Christoph Hocke; Kevin Prettyman; Nabil Mistkawi
Tags: IRDS; Particle Precursors; Wafer Defectivity