The challenges of Improving Sensitivity and Speed of Response for Detecting Airborne Molecular Contaminants in Cleanrooms

As AMCs originate from a wide variety of sources – including process chemicals, refrigerants, cleaning solvents, construction materials, and personnel - it is critical that any monitoring solution is capable of detecting a robust variety of AMCs. Technologies such as GC, IC, and CRDS are currently limited to a subset of AMC at detection limits which are no longer suitable for the ever-shrinking technology nodes produced in modern FABs because they are unable to provide fast measurements, guarantee a comprehensive monitoring of the AMCs including unknowns, and/or are not sensitive enough to trace contaminants at relevant levels. In this work, the Vocus ABC monitor is presented as a recent technological solution that enables custom lists of compounds to be monitored with a sensitivity that reaches single digit parts-per-trillion volume concentration.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.

This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the AMC, Liquid Chemicals & Gases Control track, and included speakers from the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.

This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the Facilitating Water Management session.

This presentation was given at the Ultrapure Micro 2016 annual conference. It was presented in the Water Management and Wastewater Treatment track, as part of the Water Management session.