The current effort to limit or eliminate fluorocarbon materials
Date published: 2021
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This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
Companies: Enviro-Energy Solutions;
Authors: Bob McIntosh;
Tags: Environmental Impact and Compliance; Distribution Systems; PFAS