Spec Sheet - TSI AeroTrak® Cleanroom CPC

Date published:

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Using patented technology, this cleanroom CPC provides 10 nm sensitivity at a 0.1 CFM (2.83 L/min) flow rate — like no other instrument can.

Companies: TSI Incorporated;

Tags: Data Management; Fab Operation; Nanoparticle; Nanoparticles; Particle Count and Detection; Particles; Yield