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2020 |
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Microanalysis: A novel method to characterize and speciate contaminants in Ultra Pure Water (UPW) and other aqueous chemicals
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Wafer Contamination Control - Particles Monitoring session.
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Entegris;
Intel;
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Ashutosh Bhabhe;
Rushi Matkar;
Glen Slayter;
Mitchell Kilroy; Suwen Liu
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Metrology and Analytical Technology; Case Study; UPW System; Hydrogen Peroxide (H2O2); UPW Polishing |
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2018 |
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Fears and Myths in UPW Distribution
This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.
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FTD Solutions;
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Dave Buesser;
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Particles; UPW System; Distribution Systems; UPW Polishing |
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2018 |
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UPW Systems - Best Known Practices
This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.
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FTD Solutions;
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Slava Libman;
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SEMI; Risk Management; UPW System; Cost Management; UPW Polishing |
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2017 |
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UPW System Operation - Troubleshooting Training
This presentation was given at the Ultrapure Micro 2017 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.
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FTD Solutions;
Air Liquide;
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Slava Libman;
Betty Pennington
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UPW Polishing; UPW System; SEMI; Data Management |
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2017 |
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UPW Distribution System Design
This presentation was given at the Ultrapure Micro 2017 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.
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FTD Solutions;
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Dave Buesser;
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UPW System; Distribution Systems; UPW Polishing |
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2019 |
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UPW Final Filters: Case Study-Replacing UF’s with Cartridge Filters
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultrapure Water Production track, as part of the Enabling Technology session.
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Texas Instruments;
FTD Solutions
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Dave Buesser;
Armando Lopez;
Arturo Quijano;
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Filtration; UPW System; UPW Polishing |
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2018 |
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Optimization of UPW System with Improved Ion Exchange Resin
This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultrapure Water Production track, as part of the Solving Current UPW Challenges with Innovative Design Solutions session.
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Nomura Micro Science;
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Hiroshi Kimoto;
Yukio Noguchi
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Ion Exchange; UPW Polishing; UPW System; Reverse Osmosis (RO) |
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