Yield Enhancement in Wet Cleaning of Silicon Wafers by Critical Area Analysis

Date published: 2020

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Wafer Contamination Control - Particles Monitoring session.

Companies: FTD Solutions; Sinha Solutions

Authors: Slava Libman; Drew Sinha

Tags: Particle Count and Detection; IRDS; Wafer Defectivity