Company Profile

Intel, LotusWorks, Evoqua and FTD Solutions discuss the microelectronics fab construction boom, the expertise shortage, supply chain bottlenecks, and long lead times.

The advent of copper in integrated circuits in semiconductor manufacturing in the late 1990s led to the need for an efficient, environmentally compliant way to remove copper from wastewater generated from copper mechanical planarization/polishing (CuCMP) processes. CuCMP chemistry involves oxide slurry solids, chelators and other components that complicate traditional precipitation wastewater treatment methods that create a waste solid (i.e., sludge) considered to be hazardous waste by federal and state environmental regulations.

This article will discuss typical organic removal methods commonly applied in a semiconductor ultrapure water (UPW*) system and new methods for improving the removal of organic contaminants from the critical process water. An equipment manufacturer has developed an advanced oxidation processes that specifically addresses total organic carbon (TOC) levels, to reduce them to sub-part-per-billion (ppb) levels. This has been shown to have significant benefits in the integrated chip (IC) manufacturing process

Presentation given at January 20th 2022 online UPM Community event.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.

This webinar brought together the perspectives of end-users, high purity polymer material experts, and POU treatment specialists, to present a holistic view of the risks associated with high purity materials and components. Archita Sengupta, Intel, and Bob McIntosh, Enviro-Energy Solutions, opened the discussion by identifying the key technology challenges associated with high purity liquid delivery systems. Followed by a panel discussion of industry experts, the webinar addressed potential solutions and proactive strategies for improving material quality and treatment solutions to ensure high manufacturing yield.

This webinar begins with Slava Libman, FTD Solutions, presenting the annual International Roadmap for Devices and Systems (IRDS) and SEMI Standards Update. Following the presentation we continue with a panel discussion exploring risk management, resilience, and sustainability within the industry. Using the IRDS roadmap as an outline, our expert panellists discuss the continuing need for making improvements to technological gaps and facilities’ environmental footprints, whilst building a secure and sustainable future for the industry.

This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.

This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented during the Learning Series, as part of the Water Management and Wastewater Treatment track.

This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.