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2023 |
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Device Yield and Reliability: Exploring Solutions for the Semiconductor Industry
Find the webinar Q&A here: https://www.ultrapuremicro.com/insights/expert-q-a-driving-solutions-yield-and-reliability-solutions-in-the-semiconductor-industry 3D chip structures, heterogeneous integration, and smaller technology nodes mean that critical defect sizes are at single-digit nanometer scales. Consumer demand for longer-lasting chips also puts pressure on contamination control needs. Quality specifications are harder than ever to meet, and they will only become more stringent. Presented in this webinar is some of the most cutting-edge research related to yield enhancement for liquid chemicals and water.
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Bob McIntosh;
Gary van Schooneveld;
Jochen Ruth;
Ashutosh Bhabhe;
Mustafa Badaroglu; Nabil Mistkawi
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Yield; Particles; Particle Precursors; Metrology and Analytical Technology |
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2023 |
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Environmental Sustainability: Driving Innovation in the Semiconductor Industry and Beyond
Speakers from Samsung, Intel, SCREEN, and FTD Solutions speak about why the semiconductor industry's resource consumption is dramatically increasing, as well as the water-energy relationship and other interrelated priorities which impact decision-making about sustainability.
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Slava Libman;
Paul Kerr;
James Snow;
Josh Best;
Kevin Geoghegan; Nabil Mistkawi
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Energy Conservation; Water Conservation; Environmental sustainability |
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2022 |
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Deconstructing the Challenges of Facility 2.0: Device Complexity Drives Facility Complexity
A discussion of how the production of new complex devices is causing complications for the construction and operation of huge new semiconductor facilities.
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Dan Wilcox;
Anthony Jeffers; Brandon Ekberg; Danny Zhu; Nabil Mistkawi
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Construction; High Purity Gases; High Purity Chemicals; Supply Chain |
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2022 |
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Keynote panel: Environmental footprint
A discussion about semiconductor facilities’ environmental footprint in relation to water consumption, energy usage, and site selection considerations.
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Josh Best;
Dane Louvier; Kelly Osborne
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Water Conservation; Energy Conservation; Sustainability |
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2022 |
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Keynote Panel: Yield and Reliability- Enabling Advanced Semiconductor Yield
A discussion of how contamination and defectivity control might be done differently in the future, to enable advanced semiconductor yield.
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Slava Libman;
James Snow;
Nabil Mistkawi, Abbas Rastegar
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Yield; Wafer Defectivity; Organic Contamination; End-user |
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2022 |
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Compressed Air Operational Analysis to Gain Capacity and Improve Efficiency
Fabs may increase production capacity, which results in an increase in utility usage. As production increases, it may be difficult to complete capacity upgrades for compressed air equipment quickly enough due to equipment and construction lead times. Some systems begin to run out of redundancy. This presentation shows a case study for maintaining redundancy in order to perform proper maintenance and ensure provision of reliable compressed air to end users. The understanding of operational health of equipment is key catch problems before they cause any system impacts.
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Matthew Milan
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HVAC; Energy Conservation |
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2022 |
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Gas Analytical Needs and Expectations for EUV Nodes
This provides greater visibility to the material manufacturing process, which complements a risk-based approach to material disposition and facilitates timely response to inline material signals. Gases
have not historically resulted in the same level of fab process impact at legacy nodes; however, excursion impact of raw materials has increased exponentially at smaller and smaller nodes. More frequently, gas excursions have resulted from isolated process, raw material, and cylinder-level abnormalities not characterized on the COA. This impact has driven the need for a similar COA expansion approach within high purity gases, for quality assurance. In preparation for EUV nodes, the overall gap in analytical capability, characterization, and control between the Asian and US markets, further drives the need for this supply chain visibility. Therefore, investment and innovation in US high purity gas supply chains will be critical to achieving yield ramp in EUV nodes.
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Kristine Andrysco
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High Purity Gases; EUV; Metrology and Analytical Technology |
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2021 |
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Electrodialysis reversal enhanced by ceramic membranes for recycling of copper wastewater
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
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Greg Newbloom;
Stephanie Lopez;
Emma Feldman;
Mike Knapp;
Michael Knapp
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Copper; Membranes; Ion Exchange; Wastewater Reclamation and Reuse; End-user |
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2021 |
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Hydrogen Peroxide (H2O2) removal - GAC or enzyme approach
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
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Emma Feldman;
Stephanie Lopez;
Brian E Holton
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Copper; Hydrogen Peroxide (H2O2); Ion Exchange; End-user |
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2021 |
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Diversion of Hydrofluoric acid (HF) and ethylene glycol mix to fluoride wastewater for treatment
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
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Victoria Yun;
Dan Wilson;
Britt Taylor-Burton
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Environmental Impact and Compliance; Fluoride; End-user; Wastewater Reclamation and Reuse |
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