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2020

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Particle Analysis of unpatterned wafers with UNISERS
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Wafer Contamination Control - Particles Monitoring session.
UNISERS; ... Detection Limits; Particle Characterization; Particle Size Distribution; Particle Detection View
2020

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Wafer Contamination Control - Particles Monitoring - Q&A
This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the Ultrapure Water Production track, and included speakers from the Wafer Contamination Control - Particles Monitoring session.
UNISERS; Entegris; Sinha Solutions ... Metrology; Particle Detection; Yield View
2019
Silica Detection in H2SO4 and HCl with Universal Surface-Enhanced Raman Spectroscopy​
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Contamination Measurement session.
UNISERS; ... Surface Enhanced Raman Spectroscopy (SERS); Particle Detection; Monitoring; Multiple Trace-Impurity Analysis​; Metrology; Nonvolatile Residue Monitoring View
2018
Detection of Non-Volatile Trace-Impurities in Ultrapure Water With Universal Surface Enhanced Raman Spectroscopy
This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultrapure Water Production track, as part of the Advanced Analytical Methods for UPW session.
ETH Zurich ... Surface Enhanced Raman Spectroscopy (SERS); Non-Volatile Impurities; Raman Spectroscopy View