Resources

This library provides access to all the presentations that have been shared as part of the Ultrapure Micro conference since it began in 2015. Since then, UPM has continuously grown to include broader micro contamination issues such as ultrapure water, water management & wastewater treatment, ultra-high-performance chemicals and high-purity gases, with the additions of airborne molecular contamination and the tools environment.

To navigate this section, use the dropdown menus and search functions to narrow your search; for example, find keynote presentations by typing ‘keynote’ in the search bar, or selecting this option from the ‘Track’ dropdown menu.

Id Year Materials Info Company Author Tags View
... 2021
Study on particle behavior in ultrapure water
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultrapure water strand.
Kurita Water Industries; Yoichi Tanaka; Hideaki Iino; Minoru Uchida; Takaaki Togo; Toshimasa Kato; Yuichi Ogawa Filtration; Particles; Particle Count and Detection View
... 2021
Reliability evaluation of liquid particle counter (LPC) using field-flow fractionation toward accurate particle measurement
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultrapure water strand.
Organo; National Institue of Advanced Industrial Science and Technology Fumitaka Ichihara; Hiroshi Sugawara; Tsukasa Kondo; Ayako Nakamura; Haruhisa Kato Particle Count and Detection; Particles View
... 2021
A practical method detection limit (MDL) determination methodology using quality data
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.
Merck Group/EMD Electronics; Tom Bzik; Suhas Ketkar High Purity Chemicals; Data Management View
... 2021
The challenges of chemical waste reclamation and potential reuse within the semiconductor industry
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
Intel; Taimur Burki; End-user; Wastewater Reclamation and Reuse; Environmental Impact and Compliance View
... 2021
Enabling advanced semiconductor yield via proactive technology management
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as a keynote presentation
FTD Solutions; CT Associates; Page; Slava Libman; Gary van Schooneveld; Dan Wilcox; Bonnie Marion; IRDS; SEMI; Risk Management; Particle Precursors; Wafer Defectivity View
... 2021
Metal removal life test and organic impurity of ion exchange resin
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
Organo; Shota Morino; Noriko Hisano; Yukinari Yamashita; Ayano Kato; Yukari Nitanai Isopropyl Alcohol (IPA); Metal Contamination; Ion Exchange; Membranes; Organic Contamination View
... 2021
Evaluating three generations of UPW filtration technology using SEMI C79
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.
Intel; CT Associates; Ryan Pavlick; Gary van Schooneveld; Sriram Ramamoorthy; David Neitling; Hokkin Choi; Vani Thirumala; Vindhya SEMI; Filtration; End-user View
... 2021
Detecting aerosol events caused by nanoparticles
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.
TSI Incorporated; Richard Remiarz; Nanoparticles; Particle Count and Detection; Airborne Molecular Contamination (AMC) View
... 2021
Achieving 99% water recovery with membrane system arrangements
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
Saltworks Technologies; Pierce Maguire; Cooling Systems; Water Consumption and Conservation; Reverse Osmosis (RO); Filtration; Brine Management; Energy Conservation View
... 2021
Nanoparticle adsorption of polish IEX resins investigated by magnetic resonance imaging
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultrapure water strand.
Ovivo; Karlsruhe Institute of Technology Pia Herrling; Philippe Rychen; Frando Sinaga; Gisela Guthausen; Nicolas Schork UPW Polishing; Ion Exchange; Nanoparticle; Particle Count and Detection View