Resources

This library provides access to all the presentations that have been shared as part of the Ultrapure Micro conference since it began in 2015. Since then, UPM has continuously grown to include broader micro contamination issues such as ultrapure water, water management & wastewater treatment, ultra-high-performance chemicals and high-purity gases, with the additions of airborne molecular contamination and the tools environment.

To navigate this section, use the dropdown menus and search functions to narrow your search; for example, find keynote presentations by typing ‘keynote’ in the search bar, or selecting this option from the ‘Track’ dropdown menu.

Year Materials Info Company Author Tags View
2021

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Creating our resilient water future
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as a keynote presentation
Alliance for Water Stewardship; Adrian Sym; Water Consumption and Conservation; Supply Chain; Risk Management; Environmental Impact and Compliance View
2021

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300mm unpatterned wafer defect review and characterization with universal surface enhanced Raman spectroscopy
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.
UNISERS; Ali Altun; Wafer Defectivity; Particle Precursors; Particle Count and Detection; IRDS View
2021

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Water and wastewater supply chain management
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as a keynote presentation as part of the water and wastewater management strand.
Intel; Assaf Harel; Supply Chain; End-user; Risk Management View
2021

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The current effort to limit or eliminate fluorocarbon materials
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
Enviro-Energy Solutions; Bob McIntosh; Environmental Impact and Compliance; Distribution Systems; PFAS View
2021

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Proactive quality management in the UPW polish system
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultrapure water strand.
FTD Solutions; Intel; CT Associates; Bonnie Marion; Peter Maenke; Gary van Schooneveld; Josh Best; Slava Libman; Rushi Matkar; UPW Polishing; Particles; Ion Exchange; End-user View
2021

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The business of saving water
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
STMicroelectronics; Isle Group Carles Crespo; Mattias Espanet; Water Consumption and Conservation; Wastewater Reclamation and Reuse; Reverse Osmosis (RO); Membranes; Cooling Systems; End-user View
2021

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Doing more with less - minimizing data center water and wastewater
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
HDR; Daniel Sampson; Case Study; Reverse Osmosis (RO); Cooling Systems; Silica; Brine Management View
2021

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Diversion of Hydrofluoric acid (HF) and ethylene glycol mix to fluoride wastewater for treatment
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
Samsung Austin Semiconductor; Victoria Yun; Dan Wilson; Britt Taylor-Burton Environmental Impact and Compliance; Fluoride; End-user; Wastewater Reclamation and Reuse View
2021

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Risk centered asset management
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the water and wastewater management strand.
FTD Solutions; Micron; Dave Buesser; Deena Starkel; Case Study; Risk Management; End-user; Fab Operation View
2021

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Calibration of condensation particle counter detection efficiency using mono-disperse aerosols
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultrapure water strand.
Kanomax FMT; Derek Oberreit; Siqin He Particles; Particle Count and Detection View