300mm unpatterned wafer defect review and characterization with universal surface enhanced Raman spectroscopy

Date published: 2021

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This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.

Companies: UNISERS;

Authors: Ali Altun;

Tags: Wafer Defectivity; Particle Precursors; Particle Count and Detection; IRDS