A Novel ICP-MS Metrology for Analysis of Nanoparticles in UPW​

Date published: 2019

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This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW Analytical Methods and Techniques session.

Companies: Air Liquide;

Authors: Jinjin Wang; Fuhe Li; Lisa Mey-Ami

Tags: Metrology and Analytical Technology; Nanoparticles; IRDS