Advanced Technology Design for hot UPW supply
Date published: 2022
Please login or subscribe to view UPM Resources.
A study of operational decisions to increase capacity to allow greater consumption of hot ultrapure water. This presentation shows a new design in a fab which is successively transferred to the other existing hot ultra pure water plants, in order to be able to react to future changes in consumption.
Authors: Ute Sierig;
Tags: Fab Operation; Ultraviolet (UV); UPW System