Advanced Technology Design for hot UPW supply

Date published: 2022

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A study of operational decisions to increase capacity to allow greater consumption of hot ultrapure water. This presentation shows a new design in a fab which is successively transferred to the other existing hot ultra pure water plants, in order to be able to react to future changes in consumption.

Companies: GlobalFoundries;

Authors: Ute Sierig;

Tags: Fab Operation; Ultraviolet (UV); UPW System