Enabling advanced semiconductor yield via proactive technology management

Date published: 2021

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as a keynote presentation

Companies: FTD Solutions; CT Associates; Page;

Authors: Slava Libman; Gary van Schooneveld; Dan Wilcox; Bonnie Marion;

Tags: IRDS; SEMI; Risk Management; Particle Precursors; Wafer Defectivity