Evaluation of Trace Total Organic Carbon in High Purity Sulfuric Acid

Date published: 2018

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This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Chemicals in Semiconductor Manufacturing session.

Companies: SUEZ Water Technologies & Solutions;

Authors: Brett Clark;

Tags: Total Organic Carbon (TOC); High Purity Chemicals; Metrology and Analytical Technology