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Long-Term Plant Operation Practices

Date published: 2017

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This presentation was given at the Ultrapure Micro 2017 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW System Optimization session.

Companies: Ovivo; Soitec;

Authors: Philippe Rychen; Jean-Marc Meyer

Tags: Fab Operation; Supply Chain; Water Consumption and Conservation; UPW System