Microanalysis: A novel method to characterize and speciate contaminants in Ultra Pure Water (UPW) and other aqueous chemicals

Date published: 2020

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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Wafer Contamination Control - Particles Monitoring session.

Companies: Entegris; Intel;

Authors: Ashutosh Bhabhe; Rushi Matkar; Glen Slayter; Mitchell Kilroy; Suwen Liu

Tags: Metrology and Analytical Technology; Case Study; UPW System; Hydrogen Peroxide (H2O2); UPW Polishing