Microanalysis: A novel method to characterize and speciate contaminants in Ultra Pure Water (UPW) and other aqueous chemicals
Date published: 2020
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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Wafer Contamination Control - Particles Monitoring session.
Authors: Ashutosh Bhabhe; Rushi Matkar; Glen Slayter; Mitchell Kilroy; Suwen Liu
Tags: Metrology and Analytical Technology; Case Study; UPW System; Hydrogen Peroxide (H2O2); UPW Polishing