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2021 |
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Measurement of nanoparticles and their precursors
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.
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Airmodus;
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Joonas Vanhanen;
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Airborne Molecular Contamination (AMC); Nanoparticles; Metrology and Analytical Technology; Particle Precursors; Particle Count and Detection |
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| ... |
2021 |
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Real-time monitoring of AMCs from lab to fab
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
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IONICON Analytik;
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Jens Herbig;
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Airborne Molecular Contamination (AMC); Metrology and Analytical Technology |
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| ... |
2021 |
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Enhanced rate-of-rise measurements using oxygen
This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the airborne molecular contamination (AMC) and high purity gases control strand.
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Hexisense;
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Ian Rousseau;
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Airborne Molecular Contamination (AMC); Metrology and Analytical Technology; High Purity Gases |
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2020 |
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AMC & High Purity Gases Control - Q&A
This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the AMC, Liquid Chemicals & Gases Control track, and included speakers from the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.
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Texas A&M University;
Air Liquide;
Tiger Optics;
Syft Technologies
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Walter Den;
Florian Adler;
Helena Barnes; Maohua Pan
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Airborne Molecular Contamination (AMC); Metrology and Analytical Technology; High Purity Gases |
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| ... |
2020 |
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The challenges of Improving Sensitivity and Speed of Response for Detecting Airborne Molecular Contaminants in Cleanrooms
This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.
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Tiger Optics;
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Florian Adler;
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Airborne Molecular Contamination (AMC); Fluoride; Ammonia; Metrology and Analytical Technology |
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| ... |
2019 |
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Xe Recovery and Reuse System from Etching Process Exhaust Gas
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
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Organo;
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Takashi Futatsuki;
Yoshinori Ono; Yuki Nakamura
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High Purity Gases; Metrology and Analytical Technology |
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| ... |
2019 |
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Ultrapure CO2 Supply and Recycle System for the Supercritical CO2 Drying Process in Nano-Scale Semiconductor Manufacturing
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
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Organo;
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Takashi Futatsuki;
Hiroshi Sugawara; Yoshinori Ono
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High Purity Gases; Particle Count and Detection; Metrology and Analytical Technology |
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| ... |
2019 |
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Advanced Microscopy for Quantification and Identification in UPW, Process Chemicals, and Industrial Gases
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Nanoscale Analytical: PPW? session.
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Air Liquide;
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Fang Li;
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Nanoparticles; Metrology and Analytical Technology; Filtration; Particle Count and Detection; High Purity Gases |
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