Real-time monitoring of AMCs from lab to fab
Date published: 2021
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This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the combined track, which contained presentations on airborne molecular contamination (AMC) and high purity gases, and ultra high purity chemicals.
Companies: IONICON Analytik;
Authors: Jens Herbig;
Tags: Airborne Molecular Contamination (AMC); Metrology and Analytical Technology