Removal of trace metals from Ultra Pure Water (UPW) using membrane-based solutions

Enabling Advanced Semiconductor Yield via Proactive Technology Management - an overview of the IRDS research work and future roadmap, as well as SEMI standard and future focus areas.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as a keynote presentation

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultra high purity chemicals strand.

This presentation was given as part of the Ultrapure Micro 2021 annual conference. It was given as part of the ultrapure water strand.

Particles in ultrapure water (UPW), used during the manufacture of microcircuits on semiconductor wafers, can deposit onto the wafer surface thereby causing decreased yield and reliability of the microcircuits. As microcircuit future sizes continue to decrease, understanding the ability of a filter to capture and retain these particles becomes increasingly important and challenging. In 2013, SEMI C79-0113, “Guide to Evaluate the Efficacy of Sub-15 nm Filters used in Ultrapure Water (UPW) Distribution System” was published. This document provides a SEMI recommended method for evaluating the efficacy of filter elements used to remove particles in UPW fluid streams. Since the release of this guide, the method has been enhanced to allow quantification of particle retention over a broad size range. This was accomplished by adding larger silica particles to the Ludox® SM30 silica specified by SEMI C79 resulting in a poly-dispersed silica challenge. A particle size distribution (PSD) slope of -2 (log-log) was selected so the challenge would more closely mimic a PSD typically found in UPW, yet still have sufficient large particles to measure a log retention value of 2 or 99% retention. This silica challenge has been designated as an “area-weighted challenge”. The use of this enhanced method has resulted in some interesting observations including indication of a most penetrating particle size similar to what is observed in gas filtration. The presence of a most penetrating particle size would indicate that retention mechanisms other than sieving are active, particularly for particles smaller than 30 nm. This paper will review the enhancements made to the test method, review the retention data from a number of filter types and manufacturers, and discuss the implications for filters used in UPW. This article was originally published in the Ultrapure Micro Journal in November 2017.

This webinar brought together the perspectives of end-users, high purity polymer material experts, and POU treatment specialists, to present a holistic view of the risks associated with high purity materials and components. Archita Sengupta, Intel, and Bob McIntosh, Enviro-Energy Solutions, opened the discussion by identifying the key technology challenges associated with high purity liquid delivery systems. Followed by a panel discussion of industry experts, the webinar addressed potential solutions and proactive strategies for improving material quality and treatment solutions to ensure high manufacturing yield.

This webinar begins with Slava Libman, FTD Solutions, presenting the annual International Roadmap for Devices and Systems (IRDS) and SEMI Standards Update. Following the presentation we continue with a panel discussion exploring risk management, resilience, and sustainability within the industry. Using the IRDS roadmap as an outline, our expert panellists discuss the continuing need for making improvements to technological gaps and facilities’ environmental footprints, whilst building a secure and sustainable future for the industry.

This Q&A session took place at the 2020 Ultrapure Micro annual conference. It was a part of the Ultrapure Water Production track, and included speakers from the UPW Contamination Control session.

This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.

This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented during the Learning Series, as part of the Ultrapure Water Production track.