Removal of trace metals from Ultra Pure Water (UPW) using membrane-based solutions

Date published: 2020

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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW Contamination Control session.

Companies: Entegris;

Authors: Ashutosh Bhabhe; Brant Kim; Jad Jaber; James Hamzik; Justin Brewster; Nathaniel Goff; Siddarth Sampath

Tags: Metal Contamination; Silica; IRDS; SEMI; Filtration