Ultrapure CO2 Supply and Recycle System for the Supercritical CO2 Drying Process in Nano-Scale Semiconductor Manufacturing
Date published: 2019
Please login or subscribe to view UPM Resources.
This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
Authors: Takashi Futatsuki; Hiroshi Sugawara; Yoshinori Ono
Tags: Carbon Dioxide (CO2); CO2 Drying Process; Nano-Scale; Recovery; Recycle