Understanding Nanoparticle Contamination in Ultrapure Water Generation and Distribution

Date published: 2020

This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the UPW Contamination Control session.

Companies: Intel; Particle Measuring Systems;

Authors: Glen Slayter; Dan Rodier;

Tags: End-user; Nanoparticles; Particle Count and Detection; Metrology and Analytical Technology; Case Study; UPW Polishing