Xe Recovery and Reuse System from Etching Process Exhaust Gas
Date published: 2019
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This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
Authors: Takashi Futatsuki; Yoshinori Ono; Yuki Nakamura
Tags: Xenon (Xe); Chromatography; Vacuum Chromatography; Exhaust Gas