Xe Recovery and Reuse System​ from Etching Process Exhaust Gas​

Date published: 2019

Please login or subscribe to view UPM Resources.

This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.

Companies: Organo;

Authors: Takashi Futatsuki; Yoshinori Ono; Yuki Nakamura

Tags: Xenon (Xe); Chromatography; Vacuum Chromatography; Exhaust Gas